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JIANJUN LAI1,* , BING WANG1, ERJING ZHAO1, XIAOMING WAN1, SIHAI CHEN1
A novel long-wave infrared absorption structure containing conducting thin film of TiNx and gold is proposed and simulated with FDTD method. This new structure has shown peak absorbance over 93% and more than 80% average absorbance at 8～12 μm theoretically. Nano-grain vanadium oxide (VOx) uncooled 2×64 linear infrared microbolometers with this new infrared absorption structure have been successfully fabricated. The normalized detectivity of the sensing element at peak wavelength is measured to be about 6 × 108 cmHz1/2 W-1, which is feasible to practical imaging application.
Vanadium oxide, Microbolometer, Infrared absorbtion.
JIANJUN LAI, BING WANG, ERJING ZHAO, XIAOMING WAN, SIHAI CHEN, Vanadium oxide linear array infrared microbolometer with a novel infrared absorption structure, Optoelectronics and Advanced Materials - Rapid Communications, 4, 10, October 2010, pp.1481-1484 (2010).
Submitted at: Aug. 28, 2010
Accepted at: Oct. 14, 2010
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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