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Selective removal of gold films with picosecond laser pulses

A. STRATAN1, L. RUSEN1,* , M. ULMEANU1, C. FENIC1, R. DABU1

Affiliation

  1. Department of Lasers, National Institute for Laser, Plasma, and Radiation Physics, 409 Atomistilor St., PO Box MG-36, 077125 Bucharest, Romania

Abstract

Picosecond laser ablation of thin gold films has been investigated by using the second-harmonic output of a Nd:YAG laser. An in situ calibration-method for laser pulses with Gaussian spatial profile is described and then applied to determine the pulse peak-fluence incident on the films surface. For 200-nm gold films (150-nm Au + 50-nm Cr on silicon substrate) irradiated with 400-ps Gaussian laser pulses at 532-nm wavelength, a peak-fluence of 0.53 J/cm2 at the ablation threshold was measured, and a selective, single-shot removal of the gold layer was obtained in the 2-4 J/cm2 peak-fluence range..

Keywords

Picosecond laser, Fluence calibration, Gold film, Selective removal.

Citation

A. STRATAN, L. RUSEN, M. ULMEANU, C. FENIC, R. DABU, Selective removal of gold films with picosecond laser pulses, Optoelectronics and Advanced Materials - Rapid Communications, 4, 1, January 2010, pp.115-118 (2010).

Submitted at: July 6, 2020

Accepted at: Jan. 19, 2010