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WANG XUEMIN1, SHENG CHANGLE1, WANG YUYIN1, PENG LIPING1, WU WEIDONG1,* , TANG YONGJIAN1
Tungsten-doped diamond-like carbon films with a total thickness about 300 nm were prepared by pulsed laser deposition (PLD) method on silicon substrates. The properties of these films were examined by X-ray diffractometer (XRD), white light interferometer, Raman spectroscopy and nanoindentation. The presence of obvious broad peaks for diffraction planes (111) indicates the formation of WC1-x phase in the films. Surface morphology confirms the smooth surface of the films (RMS: ~6.36 nm). The behavior of D to G peak intensity ratio has been obtained. It may result from the formation of W-C bonds. Due to the introduction of WC1-x crystallites in the matrix, optimal deposition time of tungsten leads to the highest hardness..
Coating materials, Laser processing, X-ray diffraction, Mechanical properties.
WANG XUEMIN, SHENG CHANGLE, WANG YUYIN, PENG LIPING, WU WEIDONG, TANG YONGJIAN, Pulsed laser deposition of tungsten-doped diamond-like carbon films, Optoelectronics and Advanced Materials - Rapid Communications, 7, 3-4, March-April 2013, pp.179-183 (2013).
Submitted at: Nov. 29, 2012
Accepted at: April 11, 2013
Optoelectronics and Advanced Materials - Rapid Communications
(2022): 0.5 - 2022 Journal Citation Reports (Clarivate Analytics, 2023)
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