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Pulsed laser deposition and characterization of diamond like carbon (DLC) films on germanium, silicon and glass substrates

S. M. JAVED AKHTAR1,* , B. ILYAS1, M. ASHRAF1, N. MAHMOOD1, M. WARIS1

Affiliation

  1. Optics Laboratorie, P.O. Nilore, Nilore, Islamabad 45650, Pakistan

Abstract

Pulsed Laser Deposition (PLD) technique has been employed to deposit Diamond Like Carbon (DLC) films with modified parameters on germanium, silicon and glass substrates. A target of graphite was ablated by pulsed laser of 355 nm at room temperature with high repetition rate of 30 Hz. At 300mJ laser energy, 30Hz rate, 20oC temperature and 3.8cm substrate to target distance, good adhesive properties of the DLC films deposited on three different substrates were occurred under the same environment. Intensities ratio ID/IG of the D (for disorder-induced mode) and G (for Raman-allowed graphite-mode) bands were determined. The increase in transmission was observed in near infrared (NIR) and far infrared (FIR) region after depositing DLC coatings on Ge and Si substrates. Atomic force microscopy (AFM) and x-ray diffraction (XRD) were used for the study of surface morphology and structural properties. Various physical properties were determined.

Keywords

PLD, DLC, Optical coatings, Raman spectroscopy, Band gap.

Citation

S. M. JAVED AKHTAR, B. ILYAS, M. ASHRAF, N. MAHMOOD, M. WARIS, Pulsed laser deposition and characterization of diamond like carbon (DLC) films on germanium, silicon and glass substrates, Optoelectronics and Advanced Materials - Rapid Communications, 3, 3, March 2009, pp.276-281 (2009).

Submitted at: March 17, 2009

Accepted at: March 19, 2009