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Photonic molecular effects associated to the sputtering process in a glow discharge optical emission spectrometer

A. SURMEIAN1,* , A. GROZA1, C. DIPLASU1, M. GANCIU2, C.M. TEODORESCU3, A. TEMPEZ4, P. CHAPON4

Affiliation

  1. National Institute of Lasers, Plasma and Radiation Physics, PO Box MG-36, 077125 Magurele-Ilfov, Romania
  2. Laboratoire de Physique des Gaz et des Plasmas, UMR CNRS-UPS 8578, Université Paris-Sud, Bat 210, 91405 Orsay, France
  3. National Institute of Materials Physics, PO Box MG-7, 077125 Magurele-Ilfov Romania
  4. Horiba Jobin Yvon, 91665 Longjumeau, France

Abstract

Spectral emission of a Xenon discharge in the presence of NaCl powder is strongly modified and dominated by the XeCl excimer band at 308 nm. Materials introduced in gas electrical discharges interact with the reactive species produced in the plasma: electrons, ions and metastable atoms. In this paper, the influence of ions and metastable atoms of a capacitive RF Xenon discharge plasma (20W, 30MHz) 5 Torr on the structure of a NaCl powder introduced in the discharge has been investigated.

Keywords

Glow discharge, GDOES, XeCl excimer, X-Ray photoelectron spectroscopy, Optical emission spectrometer.

Citation

A. SURMEIAN, A. GROZA, C. DIPLASU, M. GANCIU, C.M. TEODORESCU, A. TEMPEZ, P. CHAPON, Photonic molecular effects associated to the sputtering process in a glow discharge optical emission spectrometer, Optoelectronics and Advanced Materials - Rapid Communications, 3, 1, January 2009, pp.40-43 (2009).

Submitted at: Jan. 8, 2009

Accepted at: Jan. 21, 2009