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XIN JI1,* , LIN JUN WANG1, YI MING MI2, CHAO MIN ZHANG2
Sputtering deposited LiPON films are of potential important as solid electrolyte layer in thin-film lithium cells as long as we can optimize the flow ratio process to enhance their electrical and electrochemical properties. The aim of the present study is to find the structural transformation mechanism and predict the enhanced electrochemical properties of LiPON films as a result of flow ratio processes. The results show that high flow ratio processes not exceeding 0.3 can produce regrown and agglomerate of the LiPON amorphous structure by an activated growth mechanism. In addition, an inverse relation between the flow ratio process and carrier mobility is observed in the enhancement of the electrical properties of the LiPON films. Finally, high flow ratio processes are found to be vital for the increase of the transmission rate of lithium ion which can be beneficial to enhance the efficiency of LiPON lithium cells..
Lipon film, Flow ratio, Reaction deposition, Electrochemical properties.
XIN JI, LIN JUN WANG, YI MING MI, CHAO MIN ZHANG, N2/Ar flow ratio process on the structures and properties enhancement of LiPON film lithium cells, Optoelectronics and Advanced Materials - Rapid Communications, 9, 11-12, November-December 2015, pp.1458-1461 (2015).
Submitted at: Sept. 3, 2015
Accepted at: Oct. 28, 2015
Optoelectronics and Advanced Materials - Rapid Communications
(2022): 0.5 - 2022 Journal Citation Reports (Clarivate Analytics, 2023)
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