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Measurement of displacement using double collimators and variable spacing grating fabricated by electron beam lithography

WEI HE1,2,* , QIMENG TAN3,* , YUNHUI DONG1,2, ZHIHAN LI1,2, LIANQING ZHU1,2

Affiliation

  1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science & Technology University, Beijing 100192, China
  2. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University, Beijing 100192, China
  3. Beijing Key Laboratory of Intelligent Space Robotic Systems Technology and Applications, Beijing Institute of Spacecraft System Engineering, Beijing 100094, China

Abstract

In this study, a displacement sensing system based on a variable spacing grating was proposed and experimentally demonstrated. The variable spacing grating was fabricated by electron beam lithography and reactive ion etching technique, and the initial line density was 950 L/mm. Double collimators were selected for transmit incident light and receive diffracted light respectively, and the incident and diffracted light angles were maintained at 46°. A one-dimensional displacement platform was controlled to move the light spot on the grating surface, during 40 mm displacement, the central wavelength of the diffraction spectra was changed from 944.01 nm to 1553.03 nm gradually. Then, the light spot was moved back to its initial position, and the central wavelength of the diffraction spectra were adjusted from 1553.03 nm to 944.37 nm. The displacement sensitivity and linearity were 15.310 nm/mm and 0.986, respectively. The system has a large displacement measurement range and exhibits good repeatability.

Keywords

Variable spacing grating, Electron beam lithography, Double collimators, Displacement measurement.

Citation

WEI HE, QIMENG TAN, YUNHUI DONG, ZHIHAN LI, LIANQING ZHU, Measurement of displacement using double collimators and variable spacing grating fabricated by electron beam lithography, Optoelectronics and Advanced Materials - Rapid Communications, 17, 5-6, May-June 2023, pp.185-190 (2023).

Submitted at: Jan. 22, 2023

Accepted at: June 6, 2023