In this paper, a composite fabricating method was proposed for manufacturing 1×16 MMI vertical coupling optical splitter
with Su8 core layer and air cladding layer. The femtosecond laser composite fabrication combined simultaneous spatial
and temporal focusing technology with traditional lens focusing method. Compared with the traditional lens focusing
method, this composite fabricating method improved the processing accuracy. The diameter of incident aperture was 5
mm, the distance of grating pairs was 500 mm, and the angle of grating pairs was 48°, the groove density of gratings was
1500 lines/mm. The femtosecond laser wavelength was 800 nm, wavelength width was 8 nm, and, 100 fs pulses with a
maximum pulse energy of 0.4 mJ at a repetition rate of 10 kHz. The testing results showed average insertion loss of each
output port was 18.34 dB, and non-uniformity was 0.1988 dB in the optical splitter. This met requirements of vertical
coupling optical interconnection for the EOPCB.
Vertical coupling, Composite fabricating method, Simultaneous spatial and temporal focusing.
QING TAO, LIANGPENG WEI, SIHAO XIE, Manufacturing 1×16 MMI vertical coupling optical splitter based on composite fabricating method, Optoelectronics and Advanced Materials - Rapid Communications, 16, 9-10, September-October 2022, pp.397-406 (2022).
Submitted at: May 31, 2022
Accepted at: Oct. 5, 2022