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FAIZUL MOHAMMAD KAMAL1, YUAN LI1,* , MASUMI SAKA1
A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and therefore, the fabricati on of micro materials by electromigration. The effectiveness of the present technique is verified by th e formation of an Al microsphere from a predefined hole According to a finite element analysis of this electrical thermal problem, the physical mechanism governing the observed behavior can be attributed to a decrease in atomic flux along the electron flo w direction , resulting from a sudden change in geometry, in the small region surrounding the predefined hole.
Al microsphere, Atomic accumulation, Atomic flux, Electromigration, Finite element analysis.
FAIZUL MOHAMMAD KAMAL, YUAN LI, MASUMI SAKA, Fabrication of Al microspheres by e lectromigration using a metal line with a sudden change in geometrical shape, Optoelectronics and Advanced Materials - Rapid Communications, 7, 3-4, March-April 2013, pp.314-318 (2013).
Submitted at: Dec. 5, 2012
Accepted at: April 11, 2013
Optoelectronics and Advanced Materials - Rapid Communications
(2022): 0.5 - 2022 Journal Citation Reports (Clarivate Analytics, 2023)
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