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Effects of substrate materials on the structure and electrical property of thermochromic VO2 film

YUEYAN LIU1, JUNCHENG LIU1,* , YUANBAO LI1, LIN REN, SAI XU1

Affiliation

  1. School of Materials Science and Engineering, Tianjin Polytechnic University, Tianjin 300387, China

Abstract

VO2 films were prepared on silicate glass, mica and quartz substrates respectively with the sol-gel method and subsequent spin coating technique. It was found that the substrates could significantly affect the film’s structure and property. The film on quartz substrate had the highest purity and the best crystallinity, and that on glass substrate followed. For all prepared films, the resistivity was temperature dependent, and the heating and cooling curves formed a hysteresis loop. The resistivity of quartz film at the room temperature was about 7 times that of mica film, and about 14 times that of glass film. During the heating process, the phase transition points of the films on silicate glass, mica and quartz substrates were 67℃, 68℃ and 64℃, and their resistivity mutations were about 2.1, 3.0 and 2.5 orders of the magnitude respectively..

Keywords

VO2 film, Substrates material, Sol-gel method, Electrical property.

Citation

YUEYAN LIU, JUNCHENG LIU, YUANBAO LI, LIN REN, SAI XU, Effects of substrate materials on the structure and electrical property of thermochromic VO2 film, Optoelectronics and Advanced Materials - Rapid Communications, 10, 11-12, November–December 2016, pp.921-924 (2016).

Submitted at: Nov. 17, 2015

Accepted at: Nov. 25, 2016