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T. L. QU1,* , Y. SONG1, K. Y. YANG1, S. Y. WU1
We attempt to analyze different theories for the calculation of antireflective nanostructures. How to choose an appropriate theory and the reason is considered in given conditions. Based on our analysis, effective medium theory (EMT) is unsuitable for nanostructures with a dimension (period) much smaller than the incident wavelength, as higher order diffraction waves other than the zeroth order diffraction propagate here. Rigorous coupled wave analysis (RCWA) can only be used in rigorously periodic conditions because the boundary conditions must be periodic, no matter the dimension of period. Finite element method (FEM) can be used in any conditions but with an excessive computation consumption..
EMT, RCWA, FEM, Nanostructure, Antireflecting.
T. L. QU, Y. SONG, K. Y. YANG, S. Y. WU, Different theories of analysis and calculation for the reflection efficiency of antireflective nanostructures, Optoelectronics and Advanced Materials - Rapid Communications, 8, 11-12, November-December 2014, pp.1039-1043 (2014).
Submitted at: Aug. 27, 2014
Accepted at: Nov. 13, 2014
Optoelectronics and Advanced Materials - Rapid Communications
(2022): 0.5 - 2022 Journal Citation Reports (Clarivate Analytics, 2023)
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