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M. BADULESCU1, I. GRUIA2,* , V. MICHELI3, L. CALLIARI3, C. SURDU-BOB1
Thermo ionic Vacuum Arc plasma (TVA) was employed to synthesize H-free DLC films containing nanocrystalline grains embedded in an amorphous structure, at high deposition rates of 1.5 μm/h. We have previously demonstrated that the grains observed in the film are diamond crystallites. The results presented in the current paper show a direct correlation of the size of the grains with distance from the anode. It was found that larger grains of the order of 100-200 nm but fewer are formed closer to the anode, whereas very smooth films with 1-2 nm roughness were obtained at 30 cm away from the anode. The control of DLC film nanoscale roughness opens the way for the fabrication of diamond devices and nanoabrasives..
TVA plasma, Diamond films, Anodic arc, Nano-abrasive.
M. BADULESCU, I. GRUIA, V. MICHELI, L. CALLIARI, C. SURDU-BOB, Diamond film nano-abrasives obtained by anodic arc, Optoelectronics and Advanced Materials - Rapid Communications, 3, 11, November 2009, pp.1207-1209 (2009).
Submitted at: Oct. 19, 2009
Accepted at: Oct. 29, 2009
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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