Abstract
The proposed cost-effective polymer-based Mach-Zehnder Interferometer (MZI) refractive index (RI) sensor with rib-slot
waveguide offers high sensitivity with a simple fabrication process. Due to recent demand in point-of-care biosensor at low
cost, we need to identify silicon wafer-based polymer material. Hence, we designed a waveguide with Benzo Cyclobutene
core and polymethyl methacrylate (PMMA) clad on a silicon wafer. The proposed gradient rib-slot waveguide structure of
2.18 μm wide and 1 μm thick, holds liquid sample in the sensing region effectively. In MZI architecture, reference arm of
1 cm and sensing arm at length of 1.3 cm with analyte refractive index of cancer cell (1.401) and Influenza A virus (1.48)
are applied with thickness range from 400 nm to 90 nm. Through Finite-difference time domain (FDTD) analysis, effective
mode index of BCB core are investigated and sensitivity results are calculated. Detection of cancer cell and Influenza A are
plotted in transmission spectrum with normal human serum RI (1.35). This novel polymer waveguide structure achieves the
MZI sensitivity of nm/RIU, which is higher in this segment of refractive index biosensing.
Keywords
Mach-Zehnder Interferometer, Refractive index sensor, Benzo Cyclobutene, Waveguide sensor.
Citation
S. PRASANNA KUMAAR, A. SIVASUBRAMANIAN, Design of polymer BenzoCycloButene (BCB) based silicon photonic MZI waveguide for label-free biosensing, Optoelectronics and Advanced Materials - Rapid Communications, 18, 3-4, March-April 2024, pp.93-102 (2024).
Submitted at: July 28, 2023
Accepted at: April 8, 2024