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Design of electro thermal MEMS mirror with wider scanning angle for endoscopic imaging



  1. Department of Electronics and Communication, Govt. Engineering College, Wayanad, 670644, Kerala, India
  2. Department of Electronics and Communication, College of Engineering, Trivandrum, 695016, Kerala, India


Endoscopic imaging and scanning inside the human body is having high relevance in medical diagnosis. For imaging of cells and tissues in the optical biopsy, the size of the scanning device must be as small as possible. So merging Micro Electro Mechanical System (MEMS) with optical technology is an attractive solution. This paper proposes a novel design of MEMS mirrors with a wider tilting angle for better endoscopic scanning. Mirrors are modelled so that a wide scanning angle is achieved at low voltages. Specific Thermal actuators are actuated by varying the applied voltage. Common materials like Aluminium and Silicon are used for mirror design. A MEMS mirror with increased aperture size and reduced device size than existing mirrors is modelled. It is observed that both the fill factor and the tilting angle of the mirror are improved. The increased tilting angle helps in wider scanning angles. Since Thermal actuators are used for tilting, the proposed mirror system is less complex and is highly useful for endoscopy imaging.


Micro Electro Mechanical System (MEMS), Endoscopic Imaging, MEMS Mirror, Electro thermal Actuators, Fill Factor.


R. PRADEEP, S. AMRITH, Design of electro thermal MEMS mirror with wider scanning angle for endoscopic imaging, Optoelectronics and Advanced Materials - Rapid Communications, 16, 1-2, January-February 2022, pp.31-35 (2022).

Submitted at: May 14, 2021

Accepted at: Feb. 10, 2022