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A new approach for fabrication of grid structures on substrates (devices) for visual characterization of ultra-small biological objects is presented. By Ar+ -ion mask implantation of silica substrates is applied to create grid structures with cells of 25 μm size and a depth of 100 nm. Demonstration of efficiency of such structures was carried out by scanning electron microscopy observation and energy dispersive spectrometry – EDX analysis using substrates with deposited Staphylococcus bacteria.
Mask-ion implantation, Counting biological grid, Microstructures.
V. G. EVTUGIN, A. M. ROGOV, V. I. NUZHDIN, V. F. VALEEV, T. S. KAVETSKYY, A. L. STEPANOV, Counting grids for analysis of small biological objects, Optoelectronics and Advanced Materials - Rapid Communications, 16, 1-2, January-February 2022, pp.54-57 (2022).
Submitted at: July 26, 2021
Accepted at: Feb. 10, 2022