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P. SLEPIČKA1,* , V. ŠVORČÍK1, M. ŠLOUF2, V. RYBKA1, M. ŠPIRKOVÁ2
Gold, silver, palladium and platinum layers were sputtered on polyethyleneterephtalate (PET) films. Sheet electrical resistance, surface topography and thickness of this nanolayers were studied by two-point technique, atomic force microscopy, scanning electron microscopy, transmission electron microscopy and atomic absorption spectroscopy. Chemical structure of metal layers was studied by X-ray photoelectron spectroscopy. Resistance of Au and Ag decreased rapidly with the formation of the continuous layer. In case of Pt and Pd this decrease was more gradual. Ag sputtered layer was oxidized. Different surface topography of layer was observed. Au and Pt layers contains worm-like structures, while Ag consists of clusters and Pd forms homogeneous layer with globe clusters. Transmission electron microscopy showed different thicknesses of the continuous metal layers sputtered under the same deposition conditions. When the metal layers are formed, the main role has the nucleation instead of sputtering yield.
Poly(ethyleneterephtalate), Sputtering, Metal nanolayers, Topography, Chemical structure, Sheet resistance.
P. SLEPIČKA, V. ŠVORČÍK, M. ŠLOUF, V. RYBKA, M. ŠPIRKOVÁ, Characterization of metal nanolayers sputtered on poly(ethyleneterephtalate), Optoelectronics and Advanced Materials - Rapid Communications, 2, 3, March 2008, pp.153-160 (2008).
Submitted at: Feb. 25, 2008
Accepted at: March 16, 2008
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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