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The beam-splitting element is described based on the connecting-layer grating to improve the performance. A connecting layer is introduced between the grating region and the substrate. Efficiencies are improved especially for TE polarization. For TE polarization with the grating depth of 0.65 m and connecting layer thickness of 0.45 m, efficiencies of 49.50% and 49.53% can be diffracted into the –1st and the 0th orders, respectively. For TM polarization with the grating depth of 1.00 m and connecting layer thickness of 0.72 m, splitting efficiencies of 49.32% and 49.62% can be divided into the two orders..
Beam splitting, Transmission efficiency, Micro-optical element.
SUFANG YIN, BO WANG, CHENGYUE SU, WENHUA ZHU, LI CHEN, LIANG LEI, JINYUN ZHOU, Beam splitting based on connecting-layer grating with improved efficiency, Optoelectronics and Advanced Materials - Rapid Communications, 12, 5-6, May-June 2018, pp.279-282 (2018).
Submitted at: Aug. 31, 2017
Accepted at: June 7, 2018