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WEIMIN LI1, HUIYING HAO1,*
Al:ZnO films were deposited on flex ible transparent polyimide(PI) substrate by magnetron sputtering at different temperatures(from room temperature to 250 ℃) using ceramic ZnO:Al (3 wt.% Al2O3 ) target without any optimized process. The PI has a high glass transition temperature more than 250 and high transmittance in the visible spectrum better than 92%.The structural, optical and electrical properties of t he film were investigated. The largest grain size was about 26.2 nm with a perfect preferential orientation of (002) planes. The lowest resistivity of AZO films deposited at 150 was 2.51×10 3 Ω·cm and average transmittance in the visible spectrum was 74.3%..
Flexible transparent substrate, Polyimide, AZO film, Magnetron sputtering, Substrate temperature.
WEIMIN LI, HUIYING HAO, Al:ZnO films deposited on flexible transparent polyimide substrate by magnetron sputtering at different substrate temperatures, Optoelectronics and Advanced Materials - Rapid Communications, 6, 1-2, January-February 2012, pp.117-120 (2012).
Submitted at: Nov. 24, 2011
Accepted at: Feb. 20, 2012
Optoelectronics and Advanced Materials - Rapid Communications
(2022): 0.5 - 2022 Journal Citation Reports (Clarivate Analytics, 2023)
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