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C. RAVARIU1, G. ALECU2,* , A. BONDARCIUC2, F. BABARADA1
The micro and nano-fluidics represents a milestone in the actual engineering and research area. Therefore the conceptual study of the structures by simulations is an important stage in design. The classical pumps with movable valves suffer from the fatigue of the movable parts, having a reduced lifetime and destroying some biological macromolecules. A valve-less micropump with a SOI membrane and a diffuser/nozzle element is in agreement with the silicon technology, being necessary special etching processes. This work proposes a micropump integrated in a SOI structure, dedicated to the bio-substances handling, as micro-dose of liquids. The simulations revealed the silicon membrane actuation, besides to the fluid flow through the valves. In this way, a designing method aided by simulations, was established as a further original issue of this paper.
Microfluidics, Simulations, Membrane, MEMS, SOI.
C. RAVARIU, G. ALECU, A. BONDARCIUC, F. BABARADA, Advanced SOI semiconductor structures for micro-dose biological samples handling, Optoelectronics and Advanced Materials - Rapid Communications, 4, 9, September 2010, pp.1375-1378 (2010).
Submitted at: Aug. 3, 2010
Accepted at: Sept. 15, 2010
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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